Magaz Pérez, María Teresa

Development of superconducting resonators for space and quantum applications

María Teresa Magaz obtained her BSc and MSc degrees in Organic Chemistry from Universidad Autónoma de Madrid in 1988 and the MSc degree in Occupational Health and Safety in 2010.

From 2010 to 2015 she worked in La Marañosa Institute of Technology (INTA) clean room, cooperating on the microfabrication of uncooled IR detectors based on PbSe.

Since 2017 she works in the Centro de Astrobiología (CSIC-INTA) in cooperation with IMDEA-Nanociencia in Madrid as an expert in clean room micro and nanofabrication. Her tasks focus on the processing and optimization of superconductor Lumped Element Kinetic Inductance Detectors (KIDs) for space and earth instrumentation.

Her expertise includes computer assistant design, fabrication using techniques such as sputtering and electron beam evaporation deposition in high vacuum conditions, atomic layer deposition (ALD) for insulator materials, optical lithography with and without mask, electronic beam lithography (EBL), wet etching and reactive ion etching (RIE) techniques and structural characterization using optical and electron microscopy.

She has contributed to more than 15 national and international congresses and is coauthor of more than 10 publications.


KeywordsKinetic Inductance Detector, superconductive devices fabrication, clean room, nano and microfabrication, lithography, microscopy, Sputtering, ALD, EBL, RIE